JPH0463412U - - Google Patents
Info
- Publication number
- JPH0463412U JPH0463412U JP10770090U JP10770090U JPH0463412U JP H0463412 U JPH0463412 U JP H0463412U JP 10770090 U JP10770090 U JP 10770090U JP 10770090 U JP10770090 U JP 10770090U JP H0463412 U JPH0463412 U JP H0463412U
- Authority
- JP
- Japan
- Prior art keywords
- base frame
- inclined surface
- horizontal surfaces
- lower horizontal
- pedestal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 claims description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 2
- 230000005484 gravity Effects 0.000 claims 1
- 238000005286 illumination Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990107700U JP2564985Y2 (ja) | 1990-10-15 | 1990-10-15 | 大型基板検査用顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990107700U JP2564985Y2 (ja) | 1990-10-15 | 1990-10-15 | 大型基板検査用顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0463412U true JPH0463412U (en]) | 1992-05-29 |
| JP2564985Y2 JP2564985Y2 (ja) | 1998-03-11 |
Family
ID=31854344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990107700U Expired - Lifetime JP2564985Y2 (ja) | 1990-10-15 | 1990-10-15 | 大型基板検査用顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2564985Y2 (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH085922A (ja) * | 1992-12-24 | 1996-01-12 | Anschuetz & Co Gmbh | 顕微鏡 |
| JP2007107884A (ja) * | 2005-10-11 | 2007-04-26 | Hitachi High-Technologies Corp | 基板検査装置及び基板検査方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6312945A (ja) * | 1986-07-03 | 1988-01-20 | Toshiba Corp | スクリ−ン検査装置 |
| JPH01140046A (ja) * | 1987-11-26 | 1989-06-01 | Tokyo Electron Ltd | 監視検査装置 |
| JPH01167817A (ja) * | 1987-12-24 | 1989-07-03 | Mitsubishi Electric Corp | 光学式顕微鏡 |
-
1990
- 1990-10-15 JP JP1990107700U patent/JP2564985Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6312945A (ja) * | 1986-07-03 | 1988-01-20 | Toshiba Corp | スクリ−ン検査装置 |
| JPH01140046A (ja) * | 1987-11-26 | 1989-06-01 | Tokyo Electron Ltd | 監視検査装置 |
| JPH01167817A (ja) * | 1987-12-24 | 1989-07-03 | Mitsubishi Electric Corp | 光学式顕微鏡 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH085922A (ja) * | 1992-12-24 | 1996-01-12 | Anschuetz & Co Gmbh | 顕微鏡 |
| JP2007107884A (ja) * | 2005-10-11 | 2007-04-26 | Hitachi High-Technologies Corp | 基板検査装置及び基板検査方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2564985Y2 (ja) | 1998-03-11 |